压电层合结构中Love波的传播及其在质量传感中的应用研究

Love wave propagation in piezoelectric layered structures and its application in mass sensing

  • 摘要: 为了探索声表面波器件在质量传感中的应用,本文应用理论分析和数值算例的方法系统研究了压电层合结构中Love波的传播特性。以附加质量层/压电敏感层/半无限大弹性半空间这种结构作为研究对象,构建理论解用以满足每层的动力学控制方程以及层与层之间的连续性边界条件,得到Love波传播的相速度方程;在验证了该相速度方程的正确性后,参数化分析了附加质量层的结构参数和材料参数对Love波相速度的影响,包括厚度、剪切模量、密度、介电系数等;最后,给出了仅考虑附加质量层惯性作用下Love波频散方程的近似求解方法,并分析了适用区间。研究结果表明:Love波对附加质量层的厚度特别敏感,而其介电系数对Love波的相速度几乎没有影响,且Love波的相速度随附加质量层密度的增大线性减小。本文给出的仅考虑附加质量层惯性的理论分析模型具有普适性,不仅在附加质量层很薄的情况下具有较高的计算精度,而且还可使求解过程得到大大简化。相关结果和方法能够为声表面器件在质量传感中的应用提供参考。

     

    Abstract: With the advantages of small size, light weight, flexible design and excellent frequency selectivity, surface acoustic wave devices are widely used in radar, communication, non-destructive testing, electronic countermeasures, TV signal processing and other fields. For exploring the application of surface acoustic wave (SAW) devices in mass sensing, the Love wave propagation in a piezoelectric layered structure is systematically investigated from perspectives of theoretical analysis and numerical examples. As for the theoretical model consisting of an additional mass layer, a piezoelectric sensing layer and a semi-infinite elastic half-space, the exact solution that simultaneously satisfy the dynamic governing equations and the continuous conditions between layers is established, and the phase velocity of Love waves is obtained.Then,the three-layer structure is degenerated into two-layer structure by stepwise degradation method, and the correctness of the theory is verified by comparing with the results of previous paper. After validation, the influence of structural and material parameters of the additional mass layer on Love wave phase velocity is conducted, including the thickness, shear modulus, density, and dielectric coefficient. Finally, an approximate method with only consideration of the inertial effect of the additional mass layer is developed, with its applicable condition demonstrated. It is revealed via numerical examples that the Love wave is very sensitive to the thickness of the additional mass layer, while the dielectric coefficient has minimal influence on the phase velocity. Additionally, the phase velocity decreases linearly when the density of the additional mass layer increases. The approximate method proposed in this paper exhibits good universality, which simplifies the wave solving, and can possess high computational accuracy when the additional mass layer is thin. The results and methods in this paper can provide guidance for the application of SAW devices in mass sensing.

     

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