Abstract: As the thermonuclear fuel container in inertial confinement fusion (ICF), the surface quality of the target capsule directly affects the success of ICF experiments. Therefore, it is crucial to inspect the morphology of ICF microspheres before fabrication. To address the issue of secondary damage to the surface of ICF microspheres during manipulation by current detection equipment, a bulk acoustic wave-driven microsphere manipulation device is proposed. This device excites an out-of-plane bending vibration mode in a vibrator composed of a piezoelectric ceramic and a metal substrate, creating an acoustic field within the liquid. The ICF microspheres are then driven by non-contact acoustic radiation forces, enabling non-destructive manipulation during ICF microsphere inspection. To analyze the relationship between the vibration of the manipulation device and the generated acoustic field, we developed an electromechanical coupling dynamics model of the vibrator using the transfer matrix method. This model comprehensively considers factors such as the size, material, boundary conditions, arrangement of piezoelectric ceramic sheets, excitation voltage, and additional load from water of the vibrator. Using this model, we calculated the vibration modes of a non-resonant traveling wave and two resonant standing waves, along with three corresponding acoustic fields. Based on calculation results, we fabricated and assembled the prototype. Vibration characteristics and manipulation performance of the prototype were studied through experiments. The results indicate a good agreement between theoretical calculations and experimental tests regarding the vibration characteristics of the acoustic manipulation device, validating the correctness of the established dynamics model. Both non-resonant traveling waves and resonant standing waves can effectively manipulate ICF microspheres, with the resonant standing wave achieving faster microsphere movement. This confirms the feasibility and effectiveness of the proposed acoustic manipulation method. Furthermore, based on the modal switching measurement and control method, the device can classify ICF microspheres by diameter without the need for a microscope.