非完全覆盖双层微梁谐振器热弹性阻尼建模

Thermoelastic damping in microbeam resonators partially covered by coatings

  • 摘要: 热弹性阻尼是决定微机械谐振器品质因子上限的关键参数之一。以往热弹性阻尼解析解只适用于完全覆盖多层微梁结构。由于制造工艺和实际功能需求,非完全覆盖双层梁为代表的复杂结构形式更普遍。基于傅里叶传热定律,推导出非完全覆盖双层微梁谐振器热弹性阻尼的解析解。同时利用数值方法和实验验证了该解析解的有效性。并分析了镀层厚度、长度和位置对热弹性阻尼的影响。

     

    Abstract: Thermoelastic damping (TED) is one of the key coefficients that determines the upper limit of the quality factor of the micromechanical resonator. In the past, the TED model was only suitable for fully covered multi?layer microbeam structures. However, due to the manufacturing process and actual functional requirements, complex structural forms represented by incompletely covered double?layer beams are more common. Based on Fourier's law of heat conduction, this paper derives an analytical model for the TED of the partially covered bilayer microbeam resonators with the heat conduction along the length and thickness directions. Meanwhile, numerical methods and experimental data are used to verify the effectiveness of the model. The effects of the thickness, length and position of the coating on the TED is also analyzed. The results provide a new idea for reducing TED by optimizing the length and position of the coating.

     

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